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  1. 1
    Silicon wafer bonding technology for VLSI and MEMS applications Subramanian S. Iyer and Andre J. Auberton-Herve (ed.).
    Published 2002
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  2. 2
    Semiconductor wafer cleaning using megasonics : role of electro-acoustic and cavitation effects in electrolyte solutions / Keswani Manish.
    by Manish, Keswani
    Published 2008
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  3. 3
    Semiconductor wafer bonding : science and technology / Q.-Y. Tong, U. Gösele.
    by Tong, Q.-Y. (Qin-Yi)
    Published 1999
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  4. 4
    3D System Integration, 2009. 3DIC 2009. IEEE International Conference on
    Published 2009
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