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1by Florine Hiersemenzel, Jagpal Singh, Jon Petzing, Richard K. Leach, F. Helmli, R. Danzl“...Optical instruments for areal surface topography measurement rely on high-precision lenses...”
Published 2012
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2“... interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface...”
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3“... analysis using non-contact optical techniques, paramaterization of the surfaces using ISO 25178 areal...”
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4“...Optical instruments for areal surface topography measurement have seen significant commercial...”
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