The measurement of rough surface topography using coherence scanning interferometry
This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measuremen...
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| Main Authors: | , , |
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| Format: | Default Report |
| Published: |
2010
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/13271 |
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