The assessment of residual flatness errors in focus variation areal measuring instruments
Optical instruments for areal surface topography measurement rely on high-precision lenses that guide the light from the object surface to the image plane. Lens aberrations may cause distortion of the transmitted image and consequently a residual flatness error in the measurement data. Previous work...
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| Main Authors: | , , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11557 |
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