Metrology of silicon photovoltaic cells using coherence correlation interferometry
Surface metrology plays an important role in the development and manufacture of photovoltaic cells and modules. Coherence Correlation Interferometry (CCI) is a non-contacting surface metrology tool with potentially important applications in the characterization of photovoltaic devices. Its major adv...
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Main Authors: | , , , , , , , |
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Format: | Default Conference proceeding |
Published: |
2011
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Subjects: | |
Online Access: | https://hdl.handle.net/2134/14666 |
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