Effects of the manufacturing process on the reliability of the multilayer structure in MetalMUMPs actuators: Residual stresses and variation of design parameters
© 2017 by the authors. Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP® actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their...
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| Main Authors: | , , , , |
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| Format: | Default Article |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/27987 |
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