Wall fluxes of reactive oxygen species of an rf atmospheric-pressure plasma and their dependence on sheath dynamics
A radio-frequency (rf) atmospheric-pressure discharge in He–O2 mixture is studied using a fluid model for its wall fluxes and their dependence on electron and chemical kinetics in the sheath region. It is shown that ground-state O, O+2 and O− are the dominant wall fluxes of neutral species, cations...
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| Main Authors: | , , , , , |
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| Format: | Default Article |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/16405 |
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