1-D fluid model of atmospheric-pressure rf He+O2 cold plasmas: parametric study and critical evaluation
In this paper atmospheric-pressure rf He+O2 cold plasmas are studied by means of a 1-D fluid model. 17 species and 60 key reactions selected from a study of 250+ reactions are incorporated in the model.O + 2 , O − 3 , and O are the dominant positive ion, negative ion, and reactive oxygen species, re...
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| Main Authors: | , , , , , |
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| Format: | Default Article |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/16402 |
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