Electron-anion separation in electronegative rf microdischarges
Several types of double-layer structures have been reported previously in the literature and the stratification of negatively charged species in electronegative discharges is a well known phenomena. Here we report on the evolution of a different type of double layer structure found in electronegativ...
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| Main Authors: | , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/17560 |
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