Tolerance on sphere radius for the calibration of the transfer function of coherence scanning interferometry
Although coherence scanning interferometry (CSI) commonly achieves a sub-nanometre noise level in surface topography measurement, the absolute accuracy is difficult to determine when measuring a surface that contains varying local slope angles and curvatures. Recent research has shown that it is pos...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Default Conference proceeding |
| Published: |
2017
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/26434 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|