Electron and ion kinetics in a micro hollow cathode discharge
Electron and ion kinetics in a micro hollow cathode discharge are investigated by means of two-dimensional axisymmetric particle-in-cell Monte Carlo collision simulations. Argon discharges at 10 and 300 Torr are studied for various driving currents. Electron and ion energy probability functions (IEP...
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| Main Authors: | , , |
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| Format: | Default Article |
| Published: |
2006
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/3222 |
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