Determination of the lateral resolution of an interference microscope using a micro-scale sphere

Determination of the lateral resolution of an interference microscope using a micro-scale sphere

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Bibliographic Details
Main Authors: Rong Su, Matthew Thomas, Peter De Groot, Jeremy Coupland, Richard K. Leach
Format: Default Conference proceeding
Published: 2018
Subjects:
Online Access:https://hdl.handle.net/2134/38267
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