Electron kinetics in radio-frequency atmospheric-pressure microplasmas
The kinetic study of three radio-frequency atmospheric-pressure helium microdischarges indicates that the electron energy probability function is far from equilibrium, and three electron groups with three distinct temperatures are identified. The relative population of electrons in different energy...
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Main Authors: | , , |
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Format: | Default Article |
Published: |
2007
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Online Access: | https://hdl.handle.net/2134/3225 |
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