Design and evaluation of a full-sensitivity tilt scanning interferometry system for displacement field tomography and profilometry
This thesis reports the investigation and further development of a tilt scanning interferometry system for surface profilometry and sub-surface tomographic applications. A new 3D full sensitivity interferometry system extends the work carried out on a previous prototype that was capable of measuring...
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| Format: | Default Thesis |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/2134/13637 |
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