Ion erosion in surface analysis
Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleani...
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| Format: | Default Thesis |
| Published: |
1985
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| Online Access: | https://hdl.handle.net/2134/28023 |
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