Multi-gas sensing design based on nonlinear coupled micromachined resonators [Extended abstract]
Micro-electromechanical (MEMS) gas sensors receive increasing interest thanks to the high demand for environmental monitoring, air quality measurement, chemical process control, and personal safety. Extensive research has been conducted to improve the selectivity and sensitivity of gas sensors. Howe...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Default Conference proceeding |
| Published: |
2024
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/25241776.v1 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|