Gas sensor based on nonlinear coupled AlN-piezoelectric micromachined resonators
This paper reports a novel Aluminium-Nitride (AlN)-based piezoelectric micromachined gas sensor relying on thermal energy dissipation (heating or cooling) of an electrically heated weakly coupled resonator. The coupled MEMS resonator, consisting of a bridge and cantilever resonators mechanically cou...
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| Main Authors: | , , , |
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| Format: | Default Conference proceeding |
| Published: |
2023
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/25226750.v1 |
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