Dynamics of a piezoelectric MEMS gas sensor based on coupled micromachined resonators
This work discusses the dynamics of MEMS structures; including a single cantilever, a single clamped-clamped beam, and a mechanically coupled cantilever and bridge resonator; actuated by Aluminum Nitride (AlN) layer, exploring the potential of coupled systems in gas sensing application. The pure AC...
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| Main Authors: | , , , |
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| Format: | Default Conference proceeding |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/25226747.v1 |
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