Dynamics of a Piezoelectric MEMS Gas Sensor Based on Coupled Micromachined Resonators
This work discusses the dynamics of MEMS structures; including a single cantilever, a single clamped beam, and a mechanically coupled cantilever and bridge resonator; actuated by Aluminum Nitride (AlN) layer, exploring the potential of coupled systems in gas sensing application. The pure AC actuatio...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Default Conference proceeding |
| Published: |
2024
|
| Subjects: | |
| Online Access: | https://dx.doi.org/10.17028/rd.lboro.25014020.v1 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|