A MEMS triple sensing scheme based on nonlinear coupled micromachined resonators
In the past few decades, advances in micro-electromechanical systems (MEMS) have produced robust, accurate, and high-performance devices. Extensive research has been conducted to improve the selectivity and sensitivity of MEMS sensors by adjusting the device dimensions and adopting nonlinear feature...
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| Main Authors: | , , |
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| Format: | Default Conference proceeding |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://dx.doi.org/10.17028/rd.lboro.25013996.v1 |
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