Multi-Gas Sensing Design based on Nonlinear Coupled Micromachined Resonators
Micro-electromechanical (MEMS) gas sensors receive increasing interest thanks to the high demand for environmental monitoring, air quality measurement, chemical process control, and personal safety. Extensive research has been conducted to improve the selectivity and sensitivity of gas sensors. Howe...
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| Main Authors: | , , |
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| Format: | Default Conference proceeding |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://dx.doi.org/10.17028/rd.lboro.25013972.v1 |
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