Nano blisters in multilayer Mo/Si coatings due to bombardment of hydrogen ions
Blistering is one of the major failures for multilayer coatings used in optical systems. By extending the blister mechanics theory of pockets of energy concentration, the nano blisters are studied on the surface of multilayer Mo/Si coatings subject to hydrogen ions bombardment. A mechanical model is...
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| Main Authors: | , , , , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2022
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/21257655.v1 |
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