Deformation characteristics in micromachining of single crystal 6H-SiC: Insight into slip systems activation

ABSTRACTSilicon carbide (SiC) is ideally suitable as a sensor material in harsh environments. Despite the brittleness in the macroscopic scale, plasticity in SiC is observed at small component length-scales. Previous nanoindentation based study combining experiment and numerical approaches of single...

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Bibliographic Details
Main Authors: KH Pang, Rongxin Zhou, Anish Roy
Format: Default Article
Published: 2020
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Online Access:https://hdl.handle.net/2134/13607675.v1
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