Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon
We report a highly sensitive wide-range resonant pressure sensor. The concept is based on tracking multiple modes of vibration of an electrothermally heated initially curved micro-beam experiencing the veering phenomenon between its first and third vibration modes. For low values of pressure, the th...
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| Main Authors: | , , |
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| Format: | Default Article |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/12647099.v1 |
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