Coherent imager module with a large field of view for synthetic aperture interferometry applications
Optical areal profilometry of large precision-engineered surfaces require high-resolution measurements over large fields of view. Synthetic Aperture Interferometry (SAI) offers an alternative to the conventional approach of stitching small fields of view (FOV) obtained with Coherent Scanning Interfe...
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| Main Authors: | , , , , |
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| Format: | Default Article |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11897379.v1 |
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