Inert gas cluster formation in sputter-deposited thin film CdTe solar cells
Magnetron sputtering is widely used for thin film deposition because it is a relatively low temperature process which also produces films with excellent uniformity. Unfortunately, in its use for the deposition of thin film CdTe devices, the inert working gas from the magnetron can incorporate into t...
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| Main Authors: | , , , , , , |
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| Format: | Default Article |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/10100903.v1 |
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