Semiconductor processing a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University IC Laboratory, San Jose, Ca.,

Semiconductor processing a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University IC Laboratory, San Jose, Ca.,

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Bibliographic Details
Corporate Authors: Symposium on Semiconductor Processing. San Jose, Calif., American Society for Testing and Materials, ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Semiconductor Equipment and Materials Institute, Stanford University. Integrated Circuits Laboratory
Other Authors: Gupta, D. C. (Dinesh C.) (ed.)
Format: eBook
Language:English
Published: Philadelphia, Pa. : American Society for Testing and Materials, c1984.
Series:Journal of ASTM International. Selected technical papers ; STP 850.
Subjects:
Silicon > Congresses.
Microelectronics > Congresses.
Semiconductor industry > Congresses.
Online Access:https://compass.astm.org/document/?contentCode=ASTM%7CSTP850-EB%7Cen-US&proxycl=https%3A%2F%2Fsecure.astm.org&fromLogin=true
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