Silicide technology for integrated circuits Lih J. Chen (ed.).

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Bibliographic Details
Corporate Author: Institution of Engineering and Technology
Other Authors: Chen, Lih J.
Format: eBook
Language:English
Published: Stevenage : IET, 2004.
Series:EMIS processing series 5
Subjects:
Online Access:http://dx.doi.org/10.1049/PBEP005E
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