14th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2006 : October 10-13, 2006, Kyoto Brighton Hotel, Kyoto, Japan / IEEE Electron Devices Society.

14th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2006 : October 10-13, 2006, Kyoto Brighton Hotel, Kyoto, Japan / IEEE Electron Devices Society. RTP 2006 : October 10-13, 2006, Kyoto Brighton Hotel, Kyoto, Japan /

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Bibliographic Details
Corporate Authors: IEEE International Conference on Advanced Thermal Processing of Semiconductors Kyoto, Japan, IEEE Electron Devices Society, IEEE Xplore (Online service)
Format: eBook
Language:English
Published: Piscataway, N.J. : IEEE, c2006.
Subjects:
Semiconductors > Heat treatment > Congresses.
Rapid thermal processing > Congresses.
Semiconductor doping > Congresses.
Semiconductors > Defects > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4200427
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