PVD for microelectronics sputter deposition applied to semiconductor manufacturing / Ronald A. Powell [and] Stephen M. Rossnagel. sputter deposition applied to semiconductor manufacturing /
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| Format: | eBook |
| Language: | English |
| Published: |
San Diego, Calif. ; London :
Academic Press,
1999.
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| Series: | Thin films ;
vol.26 |
| Subjects: | |
| Online Access: | https://ebookcentral.proquest.com/lib/lboro/detail.action?docID=313745 |
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https://ebookcentral.proquest.com/lib/lboro/detail.action?docID=313745Online Resource - Electronic book
| Copy [B308834] | Available |
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