Optical inspection of microsystems / edited by Wolfgang Osten.
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Other Authors: | |
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Format: | Book |
Language: | English |
Published: |
Boca Raton, Fla. :
CRC/Taylor & Francis,
2007.
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Series: | Optical science and engineering (Boca Raton, Fla.) ;
v. 109 |
Subjects: | |
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
670.425/OPT |
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Copy [0403368723] | Available |