MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003 San Jose, California, USA / Siegfried W. Janson chair/editor. 28-29 January 2003 San Jose, California, USA /
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Format: | Book |
Language: | English |
Published: |
Bellingham, Wash. :
SPIE,
2003.
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Series: | SPIE proceedings series
vol 4981 |
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
629.254/MEM |
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Copy [0402734440] | Available |