MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003 San Jose, California, USA / Siegfried W. Janson chair/editor. 28-29 January 2003 San Jose, California, USA /

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Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Janson, Siegfried W.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, 2003.
Series:SPIE proceedings series vol 4981
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Pilkington Library - Pilkington Main Collection

Shelfmark: 629.254/MEM
Copy [0402734440] Available