Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 San Jose, California, USA / Eric G. Johnson chair/editor.

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 San Jose, California, USA / Eric G. Johnson chair/editor. 28-29 January 2003 San Jose, California, USA /

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Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Johnston, Eric G.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, 2003.
Series:SPIE proceedings series Vol. 4984
Subjects:
Nanotechnology
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Pilkington Library - Pilkington Main Collection

Shelfmark: 620.5/MIC
Copy [0402734459] Available

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