Handbook of VLSI microlithography : principles, technology, and applications / [edited] by John Helbert.

Handbook of VLSI microlithography : principles, technology, and applications / [edited] by John Helbert. principles, technology, and applications /

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Bibliographic Details
Other Authors: Helbert, John N
Format: Book
Language:English
Published: Norwich, NY : Noyes Publications/William Andrew Pub, 2000.
Edition:2nd ed.
Subjects:
Integrated circuits > Very large scale integration
Microlithography
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Pilkington Library - Pilkington Main Collection

Shelfmark: 621.38173/HAN
Copy [0402563999] Available

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