Run-to-run control in semiconductor manufacturing / edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz.
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC Press,
c2001
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| Subjects: | |
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38153/RUN |
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| Copy [0402342305] | Available |