Fundamental aspects of ultrathin dielectrics on Si-based devices / [proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997] ; edited by Eric Garfunkel, Evgeni Gusev and Alexander Vul.

Fundamental aspects of ultrathin dielectrics on Si-based devices / [proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997] ; edited by Eric Garfunkel, Evgeni Gusev and Alexander Vul.

Saved in:
Bibliographic Details
Corporate Authors: NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding St. Petersburg, Russia, North Atlantic Treaty Organization. Scientific Affairs Division
Other Authors: Garfunkel, Eric L., Gusev, E. L. (Evgeniƒ Leonidovich), Vul', Alexander
Format: Book
Language:English
Published: Dordrecht ; London : Kluwer Academic, c1998
Series:NATO science series. v.47
Subjects:
Silicon-on-insulator technology > Congresses
Dielectric films > Congresses
Tags: Add Tag
No Tags, Be the first to tag this record!
Login for hold information

Pilkington Library - Pilkington Main Collection

Shelfmark: 621.38152/NAT
Copy [0402051203] Available

Similar Items