Silicon micromachining / M. Elwenspoek and H.V.Jansen.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Cambridge :
Cambridge University Press,
1998
|
| Series: | Cambridge studies in semiconductor physics and microelectronic engineering ;
7 |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38173/ELW |
|---|---|
| Copy [0402068262] | Available |