Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur. processing and novel fabrication techniques /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
New York ; Chichester :
Wiley,
1997
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| Subjects: | |
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38152/SEM |
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| Copy [0401641880] | Available |