Chemical vapor deposition : thermal and plasma deposition of electronic materials / Srinvasam Sivaram. thermal and plasma deposition of electronic materials /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Van Nostrand Reinhold,
1995
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.3817/SIV |
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| Copy [0401228509] | Available |