Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko. symposium held December 1-3, 1987, Boston, Massachusetts, USA /

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Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Ehrlich, Daniel J., Higashi, Gregg S, Oprysko, Modest Michael, 1957-
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, c1988
Series:Materials Research Society symposia proceedings ; v. 101
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Pilkington Library - Pilkington Main Collection

Shelfmark: 621.3817/LAS
Copy [030336501] Available