Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko. symposium held December 1-3, 1987, Boston, Massachusetts, USA /
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Format: | Book |
Language: | English |
Published: |
Pittsburgh, Pa. :
Materials Research Society,
c1988
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Series: | Materials Research Society symposia proceedings ;
v. 101 |
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
621.3817/LAS |
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Copy [030336501] | Available |