Electron-beam technology in microelectronic fabrication / edited by George R. Brewer.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York ; London :
Academic Press,
1980
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| Subjects: | |
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38173/BRE |
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| Copy [021064101] | Available |