Microlithography : process technology for IC fabrication / David J. Elliott. process technology for IC fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
c1986
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38173/ELL |
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| Copy [029224301] | Available |