Picosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits

We present picosecond backside optical measurements of currents and voltages, propagation delays, and glitches in flip-chip mounted silicon IC's. These signals are shown to compare well with prior circuit simulations, but they showed additional features not easily simulated.

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Bibliographic Details
Published in:Microelectronic engineering 1992-03, Vol.16 (1), p.313-324
Main Authors: Heinrich, H.K., Pakdaman, N., Prince, J.L., Kent, D.S., Cropp, L.M.
Format: Article
Language:English
Subjects:
Engineering
Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Optics
Physical Sciences
Physics
Physics, Applied
Science & Technology
Science & Technology - Other Topics
Technology
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Description
Summary:We present picosecond backside optical measurements of currents and voltages, propagation delays, and glitches in flip-chip mounted silicon IC's. These signals are shown to compare well with prior circuit simulations, but they showed additional features not easily simulated.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(92)90352-R