A MICROFABRICATED METAL GRATING OSCILLATOR FOR ELECTRIC FIELD DETECTION

This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes...

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Bibliographic Details
Published in:Journal of electronics (China) 2005-09, Vol.22 (5), p.564-568
Main Authors: Deng, Kai, Xia, Shanhong, Gong, Chao, Chen, Shaofeng, Bai, Qiang
Format: Article
Language:English
Subjects:
MEFS
微型电磁传感器
振荡器
电抗性离子
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Summary:This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.
ISSN:0217-9822
1993-0615
DOI:10.1007/s11767-005-0019-8