High‐power, high‐beam‐quality solid‐state lasers for materials processing applications

The Laser Science and Technology Department at Lawrence Livermore National Laboratory is developing solid‐state lasers with high average power and high beam quality. Specific systems include a laser to generate 1.0–1.4 nm X‐rays for proximity print lithography, a 400‐mJ, 500‐Hz laser for 13.0 nm pro...

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Bibliographic Details
Published in:Journal of laser applications 1996-06, Vol.8 (3), p.169-173
Main Authors: Hackel, Lloyd A., Dane, C. Brent, Hermann, Mark R., Honig, John, Zapata, Luis E., Norton, Mary A.
Format: Article
Language:English
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Summary:The Laser Science and Technology Department at Lawrence Livermore National Laboratory is developing solid‐state lasers with high average power and high beam quality. Specific systems include a laser to generate 1.0–1.4 nm X‐rays for proximity print lithography, a 400‐mJ, 500‐Hz laser for 13.0 nm projection lithography and unique systems for speckle imaging, laser radars, and medical treatments.
ISSN:1042-346X
1938-1387
DOI:10.2351/1.4745419