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Nanorod assisted lateral epitaxial overgrowth of ZnO films in water at 90 °C
A novel method was used to grow epitaxial ZnO films by employing a nanorod assisted lateral epitaxial overgrowth process at a low growth temperature of 90 °C in water utilizing a continuous circulation reactor. The relatively smooth films had an epitaxial relationship with the sapphire substrate, as...
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Published in: | CrystEngComm 2014-01, Vol.16 (1), p.69-75 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A novel method was used to grow epitaxial ZnO films by employing a nanorod assisted lateral epitaxial overgrowth process at a low growth temperature of 90 °C in water utilizing a continuous circulation reactor. The relatively smooth films had an epitaxial relationship with the sapphire substrate, as confirmed by off-axis
scans. Films grown for 72 hours had a high carrier concentration of 3.12 × 10
18
cm
−3
and mobility of 9.75 cm
2
V
−1
s
−1
after thermal treatment at 300 °C. The threading dislocation density of the thickest film was 5 × 10
8
cm
−2
, 2 orders of magnitude lower than that of normal solution grown ZnO films.
Reduction of dislocation density to 5 × 10
8
cm
−2
by lateral overgrowth of epitaxial ZnO nanorods on sapphire at 90 °C in water. |
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ISSN: | 1466-8033 1466-8033 |
DOI: | 10.1039/c3ce42139b |