Nanofabrication of Conductive Metallic Structures on Elastomeric Materials

Existing techniques for patterning metallic structures on elastomers are limited in terms of resolution, yield and scalability. The primary constraint is the incompatibility of their physical properties with conventional cleanroom techniques. We demonstrate a reliable fabrication strategy to transfe...

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Bibliographic Details
Published in:Scientific reports 2018-04, Vol.8 (1), p.6607-9, Article 6607
Main Authors: Tan, Edward K W, Rughoobur, Girish, Rubio-Lara, Juan, Tiwale, Nikhil, Xiao, Zhuocong, Davidson, Colin A B, Lowe, Christopher R, Occhipinti, Luigi G
Format: Article
Language:English
Subjects:
Aluminum
Chloroform
Elastomers
Etching
Organic compounds
Polydimethylsiloxane
Toluene
VOCs
Volatile organic compounds
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Summary:Existing techniques for patterning metallic structures on elastomers are limited in terms of resolution, yield and scalability. The primary constraint is the incompatibility of their physical properties with conventional cleanroom techniques. We demonstrate a reliable fabrication strategy to transfer high resolution metallic structures of
ISSN:2045-2322
2045-2322
DOI:10.1038/s41598-018-24901-2