Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis

Finite element method (FEM) is used for transient dynamic analysis of capacitive micromachined ultrasonic transducers (CMUT) and is particularly useful when the membranes are driven in the nonlinear regime. One major disadvantage of FEM is the excessive time required for simulation. Harmonic balance...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2010-02, Vol.57 (2), p.438-447
Main Authors: Oguz, H. Kagan, Olcum, Selim, Senlik, Muhammed N., Tas, Vahdettin, Atalar, Abdullah, Koymen, Hayrettin
Format: Article
Language:English
Subjects:
Acoustics
Biomembranes
Circuit simulation
Computer simulation
Equivalent circuits
Exact sciences and technology
Finite Element Analysis
Finite element method
Finite element methods
Fundamental areas of phenomenology (including applications)
Harmonic analysis
Harmonics
Impedance
Mathematical models
Membranes
Microtechnology - instrumentation
Nonlinear circuits
Nonlinear Dynamics
Nonlinearity
Physics
Radiators
Steady-state
Structural acoustics and vibration
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
Transient analysis
Ultrasonic transducers
Ultrasonics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Finite element method (FEM) is used for transient dynamic analysis of capacitive micromachined ultrasonic transducers (CMUT) and is particularly useful when the membranes are driven in the nonlinear regime. One major disadvantage of FEM is the excessive time required for simulation. Harmonic balance (HB) analysis, on the other hand, provides an accurate estimate of the steady-state response of nonlinear circuits very quickly. It is common to use Mason's equivalent circuit to model the mechanical section of CMUT. However, it is not appropriate to terminate Mason's mechanical LC section by a rigid piston's radiation impedance, especially for an immersed CMUT. We studied the membrane behavior using a transient FEM analysis and found out that for a wide range of harmonics around the series resonance, the membrane displacement can be modeled as a clamped radiator. We considered the root mean square of the velocity distribution on the membrane surface as the circuit variable rather than the average velocity. With this definition, the kinetic energy of the membrane mass is the same as that in the model. We derived the force and current equations for a clamped radiator and implemented them using a commercial HB simulator. We observed much better agreement between FEM and the proposed equivalent model, compared with the conventional model.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2010.1424