Development of a Two-Dimensional Ultrasonic Vibration Assisted Machining Technology with Tool Vibration

As the reliable technology, ultrasonic assisted machining is widely used for brittle materials. This paper provides a two-dimensional(2D) ultrasonic vibration assisted machining technology with tool vibration using elliptical vibrator with longitudinal mode and bending mode, and set up the experimen...

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Bibliographic Details
Published in:Key engineering materials 2011-01, Vol.487, p.419-422
Main Authors: Guo, Yin Biao, Wang, Zhen Zhong, Wu, Yong Bo
Format: Article
Language:English
Subjects:
Cutting tool materials
Devices
Machining
Polishing
Two dimensional
Ultrasonic vibration
Vibration
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Summary:As the reliable technology, ultrasonic assisted machining is widely used for brittle materials. This paper provides a two-dimensional(2D) ultrasonic vibration assisted machining technology with tool vibration using elliptical vibrator with longitudinal mode and bending mode, and set up the experiment device. Si wafer is taken as the workpiece, and single point cutting experiments for micro groove are investigated. For the further application, the ultrasonic assisted polishing experiment with wheel block is executed. Experimental results indicate that ultrasonic assisted cutting with tool vibration can improve the cutting performance and enhance the ductile removal. And the ultrasonic assisted polishing with whetstone piece makes the better surface roughness and higher material removal rate.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.487.419