Raman spectroscopy and mechanical properties of multilayer tetrahedral amorphous carbon films

In order to take the tetrahedral amorphous carbon (ta-C) films as the high acoustic impedence layer in a Bragg reflector isolating acoustic wave from the substrate in solidly mounted resonator, the multilayer films consisting of sp2-rich layers and sp3-rich layers were deposited from a filtered cath...

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Bibliographic Details
Published in:Thin solid films 2011-05, Vol.519 (15), p.4906-4909
Main Authors: Wang, Sai, Zhu, Jiaqi, Wang, Jiazhi, Yin, Xunbo, Han, Xiao
Format: Article
Language:English
Subjects:
Acoustic impedance
Acoustics
Amorphous materials
Carbon
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Curvature
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Materials science
Mathematical analysis
Mechanical and acoustical properties
Mechanical properties
Methods of deposition of films and coatings
film growth and epitaxy
Multilayer
Multilayers
Nanostructure
Physical properties of thin films, nonelectronic
Physics
Raman spectroscopy
Structure and morphology
thickness
Surface and interface electron states
Surface states, band structure, electron density of states
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Vapor deposition
Vapor phase epitaxy
growth from vapor phase
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Description
Summary:In order to take the tetrahedral amorphous carbon (ta-C) films as the high acoustic impedence layer in a Bragg reflector isolating acoustic wave from the substrate in solidly mounted resonator, the multilayer films consisting of sp2-rich layers and sp3-rich layers were deposited from a filtered cathodic vacuum arc by adjusting the substrate bias. The microstructure of the films was evaluated using a visible Raman spectroscopy. The stress was calculated according to the changed curvature of the coated and bare substrate. The hardness, modulus and scratching were measured using a nanoindenter. It has been shown that the multilayer structure maintaining high tetrahedral content, high hardness and high elastic modulus is still characterized with lower intrinsic stress and better adhesion.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2011.01.051